CONFERENCE PROCEEDINGS
Advanced Search
Chiaki Sato
at Canon Inc
SPIE Involvement:
Author
Area of Expertise:
Lithography , Stepper/Scanner
Publications (3)
Proceedings Article | 19 March 2018 Paper
Performance of a nanoimprint mask replication system
Atsushi Kimura, Kohei Imoto, Chiaki Sato, Kiyohito Yamamoto, Hiroshi Inada, Mitsuru Hiura, Takehiko Iwanaga, Ali Aghili, Makoto Mizuno, Jin Choi, Chris Jones
Proceedings Volume 10584, 105840Q (2018) https://doi.org/10.1117/12.2299636
KEYWORDS: Photomasks, Particles, Semiconducting wafers, Nanoimprint lithography, Optical lithography, Mask cleaning, Lithography, Manufacturing equipment, Capillaries, Ultraviolet radiation
Proceedings Article | 4 October 2016 Paper
Nanoimprint wafer and mask tool progress and status for high volume semiconductor manufacturing
Yoichi Matsuoka, Junichi Seki, Takahiro Nakayama, Kazuki Nakagawa, Hisanobu Azuma, Kiyohito Yamamoto, Chiaki Sato, Fumio Sakai, Yukio Takabayashi, Ali Aghili, Makoto Mizuno, Jin Choi, Chris Jones
Proceedings Volume 9985, 99851G (2016) https://doi.org/10.1117/12.2243114
KEYWORDS: Photomasks, Lithography, Nanoimprint lithography, Semiconducting wafers, Semiconductors, Particles, Semiconductor manufacturing, Curtains, Image resolution, Manufacturing
Proceedings Article | 22 March 2016 Paper
Defectivity and particle reduction for mask life extension, and imprint mask replication for high-volume semiconductor manufacturing
Keiji Emoto, Fumio Sakai, Chiaki Sato, Yukio Takabayashi, Hitoshi Nakano, Tsuneo Takabayashi, Kiyohito Yamamoto, Tadashi Hattori, Mitsuru Hiura, Toshiaki Ando, Yoshio Kawanobe, Hisanobu Azuma, Takehiko Iwanaga, Jin Choi, Ali Aghili, Chris Jones, J. W. Irving, Brian Fletcher, Zhengmao Ye
Proceedings Volume 9777, 97770C (2016) https://doi.org/10.1117/12.2219036
KEYWORDS: Photomasks, Particles, Nanoimprint lithography, Lithography, Semiconductors, Control systems, Semiconductor manufacturing, Ultraviolet radiation, Optical lithography, Dry etching, Semiconducting wafers, Curtains, Liquids, Ceramics, Overlay metrology
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top