Mr. Bin-Chang Chang Profile

Bin-Chang Chang

Engineer at Taiwan Semiconductor Manufacturing Co Ltd

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Author

Publications (3)

Proceedings Article | 20 August 2004 Paper

Study of mask corner rounding effects on lithographic patterning for 90-nm technology node and beyond

Shuo-Yen Chou, Jaw-Jung Shin, King-Chang Shu, Jan-Wen You, Lin-Hung Shiu, Bin-Chang Chang, Tsai-Sheng Gau, Burn Lin

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557745

KEYWORDS: Photomasks, Lithography, Scanning electron microscopy, Laser energy, Image processing, Electron beam lithography, Semiconducting wafers, Optical simulations, Optical proximity correction, Convolution

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Proceedings Article | 28 August 2003 Paper

Pattern-dependence optical phase effect on alternating phase shift mask

Bin-Chang Chang, Jan-Wen You, Ming Lu, Chiu-Lien Lee, Li-Wei Kung, King-Chang Shu, Jaw-Jung Shin, Tsai-Sheng Gau, Burn-Jeng Lin

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504284

KEYWORDS: Photomasks, Quartz, Etching, Chromium, Phase shifts, Wet etching, Reactive ion etching, Semiconducting wafers, Mask making, Resolution enhancement technologies

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Proceedings Article | 27 December 2002 Paper

Alt-PSM of contact with phase-assist feature for 65-nm node

Jan-Wen You, Jaw-Jung Shin, Chung-Hsing Chang, Li-Wei Kung, Bin-Chang Chang, Chang-Min Dai, Tsai-Sheng Gau, Burn Lin

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.467499

KEYWORDS: Photomasks, Resolution enhancement technologies, Etching, Wet etching, Optical lithography, Dry etching, Semiconducting wafers, Chromium, Reticles, Phase shifts

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