Dr. Aviv Frommer
EVP R&D at Lumus Ltd
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 14 March 2023 Presentation
Proceedings Volume 12450, 124500I (2023) https://doi.org/10.1117/12.2667975

Proceedings Article | 18 March 2022 Presentation
Proceedings Volume 11932, 119321R (2022) https://doi.org/10.1117/12.2632535

Proceedings Article | 29 March 2021 Presentation
Proceedings Volume 11764, 1176403 (2021) https://doi.org/10.1117/12.2597431

Proceedings Article | 24 March 2006 Paper
Daniel Kandel, Michael Adel, Aviv Frommer, Vladimir Levinski, Alexandra Rapoport, Richard Silver
Proceedings Volume 6152, 61522X (2006) https://doi.org/10.1117/12.656494
KEYWORDS: Overlay metrology, Oxides, Metrology, Silicon, Image analysis, Finite-difference time-domain method, Lithography, Process control, Electromagnetic simulation, Imaging systems

Proceedings Article | 24 March 2006 Paper
Proceedings Volume 6152, 615213 (2006) https://doi.org/10.1117/12.656467
KEYWORDS: Reticles, Overlay metrology, Scanners, Data modeling, Semiconducting wafers, Metrology, Chemical mechanical planarization, Manufacturing, Polishing, Optical alignment

Showing 5 of 7 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top