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Amos Dor
Director at PDF Solutions Inc
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Publications (1)
Proceedings Article | 5 May 2005 Paper
WAMA: a method of optimizing reticle/die placement to increase litho cell productivity
Amos Dor, Yoram Schwarz
Proceedings Volume 5756, (2005) https://doi.org/10.1117/12.584775
KEYWORDS: Semiconducting wafers, Yield improvement, Reticles, Manufacturing, Optical alignment, Photomasks, Scanners, Semiconductors, Head, Printing
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