PROCEEDINGS VOLUME 7362
SPIE EUROPE MICROTECHNOLOGIES FOR THE NEW MILLENNIUM | 4-6 MAY 2009
Smart Sensors, Actuators, and MEMS IV
Editor(s): Ulrich Schmid
Editor Affiliations +
IN THIS VOLUME

12 Sessions, 55 Papers, 0 Presentations, 0 Posters
Biosensors  (3)
Packaging  (3)
Reliability  (3)
Materials  (4)
Proceedings Volume 7362 is from: Logo
SPIE EUROPE MICROTECHNOLOGIES FOR THE NEW MILLENNIUM
4-6 May 2009
Dresden, Germany
Front Matter: Volume 7362
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736201 (2009) https://doi.org/10.1117/12.834806
Energy Scavengers
Meiling Zhu, Emma Worthington, James Njuguna
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736202 (2009) https://doi.org/10.1117/12.822829
Z. Hadas, C. Ondrusek, V. Singule
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736203 (2009) https://doi.org/10.1117/12.820919
E. Brusa, S. Zelenika, L. Moro, D. Benasciutti
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736204 (2009) https://doi.org/10.1117/12.821425
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736205 (2009) https://doi.org/10.1117/12.821606
Biosensors
Anita Lloyd Spetz, Ruth Pearce, Linnea Hedin, Volodymyr Khranovskyy, Fredrik Söderlind, Per-Olov Käll, Rositza Yakimova, Kajsa Uvdal
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736206 (2009) https://doi.org/10.1117/12.821662
Katrin Schmitt, Carsten Bolwien, Gerd Sulz, Wolfgang Koch, Wilhelm Dunkhorst, Hubert Lödding, Katharina Schwarz, Andreas Holländer, Torsten Klockenbring, et al.
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736207 (2009) https://doi.org/10.1117/12.822672
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736208 (2009) https://doi.org/10.1117/12.821653
Resonant MEMS
T. Manzaneque, J. Hernando, J. Rodríguez-Aragón, A. Ababneh, H. Seidel, U. Schmid, J. L. Sánchez-Rojas
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620A (2009) https://doi.org/10.1117/12.821651
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620B (2009) https://doi.org/10.1117/12.821705
Packaging
Thomas Stieglitz
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620C (2009) https://doi.org/10.1117/12.822279
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620D (2009) https://doi.org/10.1117/12.821186
Viorel Dragoi, Erkan Cakmak, Elliott Capsuto, Craig McEwen, Eric Pabo
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620E (2009) https://doi.org/10.1117/12.821725
Polymer Devices
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620F (2009) https://doi.org/10.1117/12.820243
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620G (2009) https://doi.org/10.1117/12.821627
Federico Carpi, Gabriele Frediani, Danilo De Rossi
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620H (2009) https://doi.org/10.1117/12.821712
Hyung-Kun Lee, Nak-Jin Choi, Sunkyung Jung, Kang-Ho Park, Jongdae Kim
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620I (2009) https://doi.org/10.1117/12.821169
Piezoelectric MEMS
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620J (2009) https://doi.org/10.1117/12.821715
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620K (2009) https://doi.org/10.1117/12.821636
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620L (2009) https://doi.org/10.1117/12.821320
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620M (2009) https://doi.org/10.1117/12.821727
Reliability
Ingrid De Wolf, Jeroen De Coster, Vladimir Cherman, Piotr Czarnecki, Stanislaw Kalicinski, Olalla Varela Pedreira, Sandeep Sangameswaran, Kris Vanstreels
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620N (2009) https://doi.org/10.1117/12.820977
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620O (2009) https://doi.org/10.1117/12.821643
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620P (2009) https://doi.org/10.1117/12.821328
Chemical Sensors
A. Lugstein, A. Avdic, E. Bertagnolli
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620Q (2009) https://doi.org/10.1117/12.822150
J. Hildenbrand, C. Peter, F. Lamprecht, A. Kürzinger, F. Naumann, M. Ebert, R. Wehrspohn, J. Wöllenstein
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620S (2009) https://doi.org/10.1117/12.821645
Materials
C. Gachot, M. Hans, R. Catrin, U. Schmid, F. Mücklich
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620U (2009) https://doi.org/10.1117/12.821661
C. Bienert, A. Roosen, M. Grosser, M. Ziegler, U. Schmid
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620V (2009) https://doi.org/10.1117/12.822665
Guenter Schultes, Ralf Koppert, Dirk Goettel, Olivia Freitag-Weber, Anne C. Probst, Ulf Werner
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620W (2009) https://doi.org/10.1117/12.820496
Sheila González-Castilla, Jimena Olivares, Marta Clement, Lucía Vergara, Laura Pulido, Enrique Iborra, Jesús Sangrador
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620X (2009) https://doi.org/10.1117/12.821485
Optical Systems
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73620Y (2009) https://doi.org/10.1117/12.822058
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736210 (2009) https://doi.org/10.1117/12.821460
Qingdang Li, Andreas Jäkel, Volker Viereck, Jürgen Schmid, Hartmut Hillmer
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736211 (2009) https://doi.org/10.1117/12.821686
Poster Session
M. Lenzhofer, A. Tortschanoff, A. Frank, T. Sandner, H. Schenk, M. Kraft, A. Kenda
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736212 (2009) https://doi.org/10.1117/12.820335
Ü. Sökmen, M. Balke, A. Stranz, S. Fündling, E. Peiner, H.-H. Wehmann, A. Waag
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736213 (2009) https://doi.org/10.1117/12.820917
Matthias Winter, Seifeddine Ben Aoun, Gregor Feiertag, Anton Leidl, Patrick Scheele, Helmut Seidel
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736214 (2009) https://doi.org/10.1117/12.821187
Chin-Hyung Lee, Ki-Tae Park, Bong-Chul Joo, Yoon-Koog Hwang
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736215 (2009) https://doi.org/10.1117/12.821304
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736216 (2009) https://doi.org/10.1117/12.821332
Rodolphe Catrin, Carsten Gachot, Günter Marchand, Ulrich Schmid, Frank Mücklich
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736217 (2009) https://doi.org/10.1117/12.821333
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736218 (2009) https://doi.org/10.1117/12.821335
Thomas Hansel, Uwe Griebner, Jens Bonitz, Christian Kaufmann
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 736219 (2009) https://doi.org/10.1117/12.821341
Martin H. Schulze, Henning Heuer, Martin Küttner
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73621A (2009) https://doi.org/10.1117/12.821443
Íñigo Garbayo, A. Tarancón, J. Santiso, A. Cavallaro, J. Roqueta, G. Garcia, I. Gràcia, C. Cané, N. Sabaté
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73621B (2009) https://doi.org/10.1117/12.821613
S. Klein, C. Comtesse, A. Bittner, H. Seidel, V. Ziegler, U. Prechtel, U. Schmid
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73621D (2009) https://doi.org/10.1117/12.821648
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73621E (2009) https://doi.org/10.1117/12.821655
Olga Jakšić, Zoran Jakšić, Jovan Matović
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73621F (2009) https://doi.org/10.1117/12.821663
Jens Teichler, Ryan Chladny, Christian Schroll
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73621G (2009) https://doi.org/10.1117/12.821674
J. Schröck, T. Meurer, A. Kugi
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73621H (2009) https://doi.org/10.1117/12.821699
Saskia Biehl, Sebastian Staufenbiel, Frank Hauschild
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73621J (2009) https://doi.org/10.1117/12.821729
G. Niarchos, E. Makarona, C. Tsamis
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73621L (2009) https://doi.org/10.1117/12.821786
T. Zöpfl, S. Klare, G. Wachutka, G. Schrag
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73621M (2009) https://doi.org/10.1117/12.821797
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73621N (2009) https://doi.org/10.1117/12.821858
M. R. Kirchhoff, G. Bogdanski, S. Büttgenbach
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73621P (2009) https://doi.org/10.1117/12.822280
Andreas Winkler, Siegfried Menzel, Hagen Schmidt
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73621Q (2009) https://doi.org/10.1117/12.822290
Tomas Jirku, Miloslav Steinbauer, Martin Kluge
Proceedings Volume Smart Sensors, Actuators, and MEMS IV, 73621S (2009) https://doi.org/10.1117/12.822822
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