Paper
25 March 2005 Properties of self-assembled ZnO nanoparticles in poly(styrene-acrylic acid) diblock copolymers - [PS]m/[PAA]n - on large area Si wafers
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Abstract
The development of ZnO nanoparticles in poly(styrene-acrylic acid), [PS]m/[PAA]n, diblock copolymer on large area Si wafers is reviewed and the study of ZnO nanoparticle properties in PS-PAA copolymer system with different parameters, m/n of 159/63 and 106/17, is reported. These diblock copolymers are expected to exhibit spherical nanosized domains of the acrylic acid blocks due to microphase separation in solid phase but with domain size and density dependent on their respective molecular block lengths. Self-assembly of ZnO nanoparticles within these domains enabled control of nanoparticle size and density. The self-assembly process involved the doping of copolymer with ZnCl2 precursor followed by delivery of nanocomposite films onto wafers by a spincasting process and subsequent conversion of ZnCl2 to ZnO. The chemical analysis of these nanocomposite films and nanoparticles were performed using X-ray Photoelectron spectroscopy (XPS) which verified the conversion to ZnO. Imaging of the nanocomposite films with atomic force microscopy (AFM) showed that particles in [PS]159/[PAA]63 and [PS]106/[PAA]17 have a size distribution of 250-350 nm and 10-60 nm, respectively. Effect of precursor overdoping on size distribution of the nanoparticles is also discussed.
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Agisilaos A. Iliadis, Hasina Afroz Ali, and Unchul Lee "Properties of self-assembled ZnO nanoparticles in poly(styrene-acrylic acid) diblock copolymers - [PS]m/[PAA]n - on large area Si wafers", Proc. SPIE 5732, Quantum Sensing and Nanophotonic Devices II, (25 March 2005); https://doi.org/10.1117/12.582681
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KEYWORDS
Nanoparticles

Zinc oxide

Silicon

Picosecond phenomena

Nanocomposites

Semiconducting wafers

Zinc

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