MEMS incandescent light source

Meg L. Tuma; Kevin King; H. Lynn Kim; Richard Hansler; Eric W. Jones; Thomas George

doi:10.1117/12.405338

26 October 2000 MEMS incandescent light source

Meg L. Tuma, Kevin King, H. Lynn Kim, Richard Hansler, Eric W. Jones, Thomas George

Proceedings Volume 4134, Photonics for Space Environments VII; (2000) https://doi.org/10.1117/12.405338
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

A MEMS-based, low-power, incandescent light source is being developed. This light source is fabricated using three bonded chips. The bottom chip consists of a reflector on Silicon, the middle chip contains a Tungsten filament bonded to Silicon and the top layer is a transparent window. A 25-micrometers -thick spiral filament is fabricated in Tungsten using lithography and wet- etching. A proof-of-concept device has been fabricated and tested in a vacuum chamber. Results indicate that the filament is electrically heated to approximately 2650 K. The power required to drive the proof-of-concept spiral filament to incandescence is 1.25 W. The emitted optical power is expected to be approximately 1.0 W with the spectral peak at 1.1 micrometers . The micromachining techniques used to fabricate this light source can be applied to other MEMS devices.

Citation Download Citation

Meg L. Tuma, Kevin King, H. Lynn Kim, Richard Hansler, Eric W. Jones, and Thomas George "MEMS incandescent light source", Proc. SPIE 4134, Photonics for Space Environments VII, (26 October 2000); https://doi.org/10.1117/12.405338

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available