Design and fabrication technology of thinned backside-excited CCD imagers and the family of the intensified electron-bombarded CCD image tubes

Ilia Nikolaevic Dalinenko; Alexandre Victorovic Malyarov; Grigory I. Vishnevsky; Michail G. Vydrevitch; Vladimir G. Kossov; Leonid Yu. Lazovsky; Sergei Vasilievic Golovkin

doi:10.1117/12.218631

8 September 1995 Design and fabrication technology of thinned backside-excited CCD imagers and the family of the intensified electron-bombarded CCD image tubes

Ilia Nikolaevic Dalinenko, Alexandre Victorovic Malyarov, Grigory I. Vishnevsky, Michail G. Vydrevitch, Vladimir G. Kossov, Leonid Yu. Lazovsky, Sergei Vasilievic Golovkin

Author Affiliations +

Proceedings Volume 2551, Photoelectronic Detectors, Cameras, and Systems; (1995) https://doi.org/10.1117/12.218631
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

This paper sums up the results of more than 10 years of experience in design and manufacturing of thinned back-side illuminated CCDs of different types. Based upon the EB- CCDs created, the family of intensified electron-bombardment CCD image tubes has been designed, fabricated, and tested. This family includes: the single-stage Gen I EB-CCD devices with the 532^*580 and 780^*580 pixels CCDs; the 'hybrid' (the EB-CCD tube plus Gen I image intensifier) devices; and the EB-CCD tubes with the 40 mm photocathode and image demagnification factor 3 to 1. The results of the tests of these devices are presented and discussed. Besides this, the near future projects concerning EB-CCD tubes with the 80 mm photocathode and with image demagnification factor 5 to 1, and EB-CCD tubes with solar blind photocathods for the UV and EUV applications are briefly described.

Citation Download Citation

Ilia Nikolaevic Dalinenko, Alexandre Victorovic Malyarov, Grigory I. Vishnevsky, Michail G. Vydrevitch, Vladimir G. Kossov, Leonid Yu. Lazovsky, and Sergei Vasilievic Golovkin "Design and fabrication technology of thinned backside-excited CCD imagers and the family of the intensified electron-bombarded CCD image tubes", Proc. SPIE 2551, Photoelectronic Detectors, Cameras, and Systems, (8 September 1995); https://doi.org/10.1117/12.218631

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available