Fusion-bonded multilayered SOI for MEMS applications

Kumaresa Somasundram; David Cole; Cormac McNamara; Anne Boyle; Paul McCann; Claire Devine; Andrew Nevin

doi:10.1117/12.502741

24 April 2003 Fusion-bonded multilayer SOI for MEMS applications

Kumaresa Somasundram, David Cole, Cormac McNamara, Anne Boyle, Paul McCann, Claire Devine, Andrew Nevin

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.502741
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

In this paper, we have presented the novel method of fabricating multiplayer-stacked SOI (MultiBond). Tight thickness and TTV control was achieved, which allowed the bonding of multiple layers of SOI of up to 4-layer stacks. Investigation of the stress showed that having the handle wafer oxidized at the back significantly reduced the stress by compensating for the buried oxide layers. Study was also made on the effect of incorporating different buried layers on the minority carrier lifetime in the SOI layer. Here, a thermally grown buried oxide layer gave the highest carrier lifetime. We have also investigated the surface defect density with different buried layer materials, and found that samples with tungsten silicide as a buried layer had the highest defect density, while an LPCVD TEOS oxide buried layer showed the lowest level.

Citation Download Citation

Kumaresa Somasundram, David Cole, Cormac McNamara, Anne Boyle, Paul McCann, Claire Devine, and Andrew Nevin "Fusion-bonded multilayer SOI for MEMS applications", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.502741

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available