Diffraction grating is an important optical device whose surface defects will seriously affect the quality of optical system.In order to achieve the diffraction grating of the ultra precision surface defect inspection, design a set of defects automatic detection system based on machine vision, we use black hat transform images highlight several images, and after a Canny edge detection, expansion, corrosion, determine the connected domain, look for the seed point, the algorithm of region growing process, realize the defect feature extraction, classification and statistics.A two-dimension displacement platform controlled by DSP is designed to realize the panoramic image Mosaic of diffraction grating and accurately locate the coordinates of defects.At the same time, the surface quality of the grating is evaluated according to the American military optical appearance standard MIL-PRF-13830B.
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