Dr. Yan Cheng
at Shanghai Inst of Microsystem & Information Tech
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 12 October 2016 Paper
Sannian Song, Lanlan Shen, Zhitang Song, Dongning Yao, Tianqi Guo, Le Li, Bo Liu, Liangcai Wu, Yan Cheng, Yuqiang Ding, Songlin Feng
Proceedings Volume 9818, 98180N (2016) https://doi.org/10.1117/12.2246211
KEYWORDS: Atomic layer deposition, Thin film deposition, Thin films, Resistance, Crystals, Chalcogenides, Chemical vapor deposition, Scanning electron microscopy, Fast packet switching, Switching

Proceedings Article | 12 October 2016 Paper
Lanlan Shen, Sannian Song, Zhitang Song, Le Li, Tianqi Guo, Bo Liu, Liangcai Wu, Yan Cheng, Songlin Feng
Proceedings Volume 9818, 98180M (2016) https://doi.org/10.1117/12.2245726
KEYWORDS: Crystals, Reactive ion etching, Plasma, Carbon, Etching, Polymers, Argon, Fluorine, Ions, Anisotropy

Proceedings Article | 12 October 2016 Paper
Qing Wang, Bo Liu, Yangyang Xia, Yonghui Zheng, Sannian Song, Yan Cheng, Zhitang Song, Songlin Feng
Proceedings Volume 9818, 98180H (2016) https://doi.org/10.1117/12.2245039
KEYWORDS: Crystals, Chromium, Chemical species, Antimony, Semiconductors, Resistance, Tellurium, Electrons, Chalcogenides, Transmission electron microscopy

Proceedings Article | 12 October 2016 Paper
Yongjin Chen, Bin Zhang, Qingqing Ding, Qingsong Deng, Yan Cheng, Zhitang Song, Jixue Li, Ze Zhang, Xiaodong Han
Proceedings Volume 9818, 98180B (2016) https://doi.org/10.1117/12.2245016
KEYWORDS: Data storage, Scanning transmission electron microscopy, Crystals, Chemical species, Transmission electron microscopy, Annealing, Diffraction, Crystallography, Temperature metrology, Tellurium

Proceedings Article | 24 January 2013 Paper
Yan Cheng, Yifeng Gu, Zhitang Song, Sannian Song, Feng Rao, Liangcai Wu, Bo Liu, Songlin Feng
Proceedings Volume 8782, 87820H (2013) https://doi.org/10.1117/12.2014873
KEYWORDS: Crystals, Antimony, Resistance, Thin films, Transmission electron microscopy, Tellurium, Binary data, Crystallography, Silicon, Temperature metrology

Showing 5 of 9 publications
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