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Ilhami Torunoglu
at Gauda Inc
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Publications (4)
Proceedings Article | 25 September 2010 Paper
An advanced modeling approach for mask and wafer process simulation
Ahmet Karakas, Erich Elsen, Ilhami Torunoglu, Curtis Andrus
Proceedings Volume 7823, 78230X (2010) https://doi.org/10.1117/12.866281
KEYWORDS: Photomasks, Semiconducting wafers, Error analysis, Image processing, Photoresist processing, Process modeling, Lithography, Calibration, Manufacturing, Statistical modeling
Proceedings Article | 3 April 2010 Paper
A GPU-based full-chip inverse lithography solution for random patterns
Ilhami Torunoglu, Ahmet Karakas, Erich Elsen, Curtis Andrus, Brandon Bremen, Boris Dimitrov, Jeffrey Ungar
Proceedings Volume 7641, 764115 (2010) https://doi.org/10.1117/12.846638
KEYWORDS: Photomasks, Lithography, Manufacturing, Process modeling, Semiconducting wafers, Logic, Optimization (mathematics), 3D modeling, Algorithm development, Light sources
Proceedings Article | 3 April 2010 Paper
OPC on a single desktop: a GPU-based OPC and verification tool for fabs and designers
Ilhami Torunoglu, Ahmet Karakas, Erich Elsen, Curtis Andrus, Brandon Bremen, Pururav Thoutireddy
Proceedings Volume 7641, 764114 (2010) https://doi.org/10.1117/12.846636
KEYWORDS: Photomasks, Optical proximity correction, Semiconducting wafers, Lithography, 3D modeling, Light sources, Algorithm development, Process modeling, Manufacturing, Computer simulations
Proceedings Article | 4 March 2010 Paper
A GPU-based full-chip source-mask optimization solution
Ilhami Torunoglu, Erich Elsen, Ahmet Karakas
Proceedings Volume 7640, 76401L (2010) https://doi.org/10.1117/12.846640
KEYWORDS: Light sources, Photomasks, Source mask optimization, Algorithm development, Optimization (mathematics), Manufacturing, Lithography, Printing, Binary data, Genetic algorithms
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