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Ari Song
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Publications (1)
Proceedings Article | 14 March 2016 Paper
Rate controlled metal assisted chemical etching to fabricate vertical and uniform Si nanowires
Ari Song, Seokhun Yun, Vaibhav Lokhande, Taeksoo Ji
Proceedings Volume 9759, 97591H (2016) https://doi.org/10.1117/12.2212105
KEYWORDS: Nanowires, Silicon, Metals, Wet etching, Manufacturing, Etching, Anisotropic etching, Dry etching, Surface roughness, Diffusion, Gold, Oxides, Silver, Lithography
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