CONFERENCE PROCEEDINGS
Advanced Search
Dr. Zhensheng Zhang
System Design Engineer at Raintree Scientific Instruments
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 8 March 2016 Paper
Sensitivity study and parameter optimization of OCD tool for 14nm finFET process
Zhensheng Zhang, Huiping Chen, Shiqiu Cheng, Yunkun Zhan, Kun Huang, Yaoming Shi, Yiping Xu
Proceedings Volume 9778, 97783A (2016) https://doi.org/10.1117/12.2219109
KEYWORDS: Process control, Metrology, Scatterometry, Critical dimension metrology, Precision measurement, Light scattering, Signal processing, Semiconductors, Measurement devices
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top