Dr. Yunbo Zhang Profile

Dr. Yunbo Zhang

at Univ of Shanghai for Science and Technology

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Publications (3)

Proceedings Article | 31 March 2014 Paper

Illumination system without scanning slit for lithographic tools

Yunbo Zhang, Aijun Zeng, Ying Wang, Mingxing Chen, Shanhua Zhang, Qiao Yuan, Huijie Huang

Proceedings Volume 9052, 90522H (2014) https://doi.org/10.1117/12.2046303

KEYWORDS: Micromirrors, Lithographic illumination, Lithography, Mirrors, Photomasks, Microlens array, Control systems, 193nm lithography, Optical scanning systems, Optical simulations

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Proceedings Article | 12 April 2013 Paper

Model of freeform illumination mode and polarization mode for 193nm immersion lithographic machine

Yunbo Zhang, Aijun Zeng, Ying Wang, Mingxing Chen, Huijie Huang

Proceedings Volume 8683, 868329 (2013) https://doi.org/10.1117/12.2011517

KEYWORDS: Polarization, Micromirrors, Wave plates, Lithography, Lithographic illumination, Microlens array, 193nm lithography, Optical components, Microlens, Diffractive optical elements

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Proceedings Article | 16 November 2011 Paper

Fast parallel 3D profilometer with DMD technology

Wenmei Hou, Yunbo Zhang

Proceedings Volume 8321, 83210L (2011) https://doi.org/10.1117/12.903771

KEYWORDS: Digital micromirror devices, Confocal microscopy, Microscopes, Micromirrors, Charge-coupled devices, Profilometers, Sensors, Objectives, Tomography, Prototyping

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