Mr. Yun Zhang Profile

Yun Zhang

at Institute of Optics and Electronics, Chinese Acade

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Proceedings Article | 29 December 2023 Paper

Correct the mid spatial frequency errors of large departure aspheric surfaces by smoothing polishing

Xin Song, Yun Zhang, Zhaoyang Wang

Proceedings Volume 12976, 129761M (2023) https://doi.org/10.1117/12.3009434

KEYWORDS: Polishing, Aspheric lenses, Spatial frequencies, Optical surfaces

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The key challenge in fabricating large departure aspheric surfaces is how to control the mid spatial frequency (MSF) errors. There are many ways to suppress the MSF errors such as changing the polishing path of the tool, using a smaller polishing tool spot, and modifying polishing parameters. Smoothing is a convenient and efficient way to directly correct MSF errors. During the smoothing process, the best-fit sphere is usually used to model the aspheric surfaces. It has a few impacts on the final quality of surfaces, but with the increase of the departure of aspheric surfaces, the curvature of large departure aspheric surfaces changes rapidly in some areas leading to the final quality not meeting the expectations since the pitch pad completely not fits with the surface in smoothing polishing. To solve this problem, an improved control with a threeaxis linked computerized numerical control machine is proposed. This method is based on matching the direction between the polishing force and the normal of surface and making the contact area between the pad and surface in the position we expect. Two large departure aspheric surfaces with the same shape were used to verify. The surface MSF errors using the unimproved method reduced from 56nm to 27nm for 9h smoothing while the surface MSF errors using the improved method reduced from 81nm to 17nm for 8h smoothing. The convergence of the improved method increased by 27%.

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