Mr. Yuh-Yan Yu Profile

Yuh-Yan Yu

at National Taiwan Univ

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Publications (2)

Proceedings Article | 15 February 2012 Paper

Generating high DOF light by using tapered hollow tube in a lithography system

Chun-Yen Chen, Yu-Hsun Lee, Chih-Jen Chien, Yuh-Yan Yu, Chih-Kung Lee

Proceedings Volume 8249, 824912 (2012) https://doi.org/10.1117/12.906722

KEYWORDS: Bessel beams, Lithography, Near field scanning optical microscopy, Finite-difference time-domain method, Microscopes, Near field optics, Semiconductor lasers, Gold, Silicon, Silica

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Proceedings Article | 23 August 2010 Paper

Ablation of silicon by focusing a femtosecond laser through a subwavelength annular aperture structure

Y. Y. Yu, C. K. Chang, M. W. Lai, L. S. Huang, C. K. Lee

Proceedings Volume 7789, 77890M (2010) https://doi.org/10.1117/12.859854

KEYWORDS: Silicon, Femtosecond phenomena, Laser ablation, Semiconductor lasers, Bessel beams, Finite-difference time-domain method, Laser energy, Laser damage threshold, Microfabrication, Laser systems engineering

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