Prof. Yue Kuo Profile

Prof. Yue Kuo

at Texas A&M Univ

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Publications (2)

Proceedings Article | 17 December 2003 Paper

Passivation of the 157-nm pellicle with nanometer thin films

Yue Kuo, Jiang Lu, Jun-Yen Tewg, Paul Zimmerman

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.517506

KEYWORDS: Pellicles, Silicon, Aluminum, Thin films, Polymers, Coating, Contamination, Magnesium, Adsorption, Tin

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Proceedings Article | 28 September 2001 Paper

New microchannel device for protein separation and detection

Yue Kuo, Hyun Ho Lee

Proceedings Volume 4560, (2001) https://doi.org/10.1117/12.443046

KEYWORDS: Proteins, Electrodes, Silicon, Resistance, Glasses, Semiconducting wafers, Etching, Plasma enhanced chemical vapor deposition, Photomasks, Adsorption

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