Mr. Yubin Zhang Profile

Yubin Zhang

at Soochow Univ.

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Publications (2)

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Proceedings Article | 6 November 2023 Paper

Static and dynamic analysis of electrostatically driven graphene nanomechanical drum resonators based on finite element models

Ce Zhang, YvBin Zhang, Chen Yang, Fengnan Chen, Heng Lu, Ying Yan, Joel Moser

Proceedings Volume 12921, 1292116 (2023) https://doi.org/10.1117/12.2688193

KEYWORDS: Graphene, Resonators, Mode shapes, Finite element methods, Electrodes, Sensors, 3D modeling, Vibration, Signal processing, Roentgenium

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Free-standing graphene membranes are the archetypes of two-dimensional nanomechanical resonators. Because of their small size, ultra-low mass, and high elastic modulus, these resonators typically vibrate at frequencies ranging from a few megahertz to a few hundreds of megahertz, and their resonant frequencies can be widely tuned by electrical means. However, because of fabrication subtleties, it has been found that actual resonant frequencies and mode shapes vary greatly from device to device. To address it, here we simulate graphene nanomechanical drum resonators with COMSOL Multiphysics finite element software. We investigate the static and dynamic characteristics of the resonator in detail. In the static case, we analyze the bent shape of the graphene membrane induced by a static gate voltage for different sizes of a local gate electrode. In the dynamic case, we simulate the influence of device geometry and built-in strain on the resonant frequency of the first vibrational mode and on its tunability. Further, because folds may form in the membrane during exfoliation and transfer to the substrate, we investigate how this imperfection affects resonant frequencies and mode shapes. To this end, we introduce a nonuniform tension along a line in our finite element model. Our study may offer guidelines to design graphene resonators, with applications in components for radio frequency signal processing and communications and for nanomechanical sensing.

Proceedings Article | 23 January 2023 Paper

Fabrication of graphene nanomechanical resonators using focused ions beam lithography

Wei Song, Youlong Xian, Heng Lu, Fengnan Chen, Ce Zhang, Yubin Zhang, Ying Yan, Joel Moser

Proceedings Volume 12556, 1255603 (2023) https://doi.org/10.1117/12.2642576

KEYWORDS: Resonators, Graphene, Reflectivity, Photodetectors, Electrodes, Silicon, Ion beam lithography, Nanolithography, Lithography, Dielectrics

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Two-dimensional (2-D) nanomechanical resonators are based on thin layers of graphene, black phosphorus, transition metal dichalcogenides and van der Waals heterostructures. Detection of nanomechanical vibrations can be done using optical reflectometry, whereby vibrations modulate the optical reflectance of the resonator. For this type of detection to work, it is essential to fabricate cavities with a precise depth. Here we report on the fabrication of 2-D nanomechanical resonators in which the cavity is made using focused ion beam (FIB) lithography. We mill down an array of cylindrical cavities with the same diameter but different depths. We drive vibrations electrically and detect vibrations optically. At the resonant frequency of vibrations, we observe that the measured signal, which is proportional to the vibrational amplitude and to a transduction factor, is different for different cavity depths. Since all resonators have the same diameter, are made of the same graphene flake and are actuated the same way, our observation implies that the transduction factor changes with cavity depth. Using principles of thin film optics, we show that each estimated transduction factor is indeed consistent with the dimensions of the resonator, including the cavity depth, the thickness of the patterned substrate, and the number of graphene layers. This result supports the idea of using FIB to fabricate cavities for 2-D nanomechanical resonators, instead of using standard wet etching or reactive ion etching which require additional lithography steps and cannot easily be used to pattern cavities with different depths on the same substrate.

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