Dr. Yoon-Ho Kang Profile

Dr. Yoon-Ho Kang

at DongJin Semichem Co Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 24 July 2002 Paper

Development of bottom antireflective coating for high-resolution KrF lithography

Yoon-Ho Kang, Chang-Il Oh, Sung Song, Deog-Bae Kim, Jae-Hyun Kim

Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474185

KEYWORDS: Etching, Lithography, Reflectivity, Refractive index, Polymers, Photoresist processing, Chromophores, Bottom antireflective coatings, Polymer thin films, Photorefractive polymers

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years