Mr. Yit Sung Ngo Profile

Yit Sung Ngo

at National Univ of Singapore

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Publications (2)

Proceedings Article | 3 April 2012 Paper

In-situ critical dimension control during post-exposure bake with spectroscopic ellipsometry

Yit Sung Ngo, Yifan Qu, Arthur Tay, Tong Heng Lee

Proceedings Volume 8324, 83242N (2012) https://doi.org/10.1117/12.916133

KEYWORDS: Semiconducting wafers, Photoresist materials, Spectroscopy, Critical dimension metrology, Spectroscopic ellipsometry, Calcium, Ellipsometry, Temperature metrology, Polarizers, Chemically amplified resists

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Proceedings Article | 2 April 2010 Paper

Monitoring and control of photoresist properties and CD during photoresist processing

Geng Yang, Yit-Sung Ngo, Andi Putra, Kar-Tien Ang, Arthur Tay, Zhong-Ping Fang

Proceedings Volume 7638, 763828 (2010) https://doi.org/10.1117/12.846560

KEYWORDS: Semiconducting wafers, Photoresist materials, Lithography, Critical dimension metrology, Spectroscopy, Photoresist processing, Manufacturing, Process control, Sensors, Resistance

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