Prof. Yasushi Makihara Profile

Prof. Yasushi Makihara

at The Institute of Scientific and Industrial Research

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Author

Publications (3)

Proceedings Article | 21 November 2023 Poster + Paper

Automatic evaluation of line-and-space resist patterns with defects using image recognition technology

Yuqing Jin, Takahiro Kozawa, Kota Aoki, Tomoya Nakamura, Yasushi Makihara, Yasushi Yagi

Proceedings Volume 12750, 1275015 (2023) https://doi.org/10.1117/12.2685766

KEYWORDS: Hough transforms, Scanning electron microscopy, Pattern recognition, Monte Carlo methods, Photoresist processing, Image filtering, Image analysis, Extreme ultraviolet, Chemical analysis, Tunable filters

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Proceedings Article | 1 May 2023 Poster + Paper

Chemical information extraction from scanning electron microscopy images on the basis of image recognition

Yuqing Jin, Takahiro Kozawa, Kota Aoki, Tomoya Nakamura, Yasushi Makihara, Yasushi Yagi

Proceedings Volume 12498, 1249825 (2023) https://doi.org/10.1117/12.2666992

KEYWORDS: Defect detection, Hough transforms, Scanning electron microscopy, Monte Carlo methods, Image filtering, Photoresist processing, Stochastic processes, Lithography, Extreme ultraviolet, Materials processing

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Proceedings Article | 14 May 2017 Paper

A visual surveillance system for person re-identification

Hazem El-Alfy, Daigo Muramatsu, Yuuichi Teranishi, Nozomu Nishinaga, Yasushi Makihara, Yasushi Yagi

Proceedings Volume 10338, 103380D (2017) https://doi.org/10.1117/12.2266509

KEYWORDS: Video, Gait analysis, Machine vision, Feature extraction, Imaging systems, Video surveillance, Surveillance, Surveillance systems, Cameras, Human subjects

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