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Yannick Bedin
at EUMETRYS SAS
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Publications (1)
Proceedings Article | 16 July 2002 Paper
Productivity enhancements in recipe creation for overlay metrology measurements
Vincent Vachellerie, Delia Ristoiu, Alain Deleporte, Marc Poulingue, Yannick Bedin, Rolf Arendt, Ganesh Sundaram, Paul Knutrud
Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473492
KEYWORDS: Semiconducting wafers, Overlay metrology, Metrology, Time metrology, Optical alignment, Process control, Prototyping, Metals, Niobium, Semiconductors
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