Ms. Yan Yu Profile

Yan Yu

at Chongqing Institute of Metrology And Quality Inspection

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Proceedings Article | 18 December 2019 Paper

An experimental evaluation method for the performance of multiple probes on coordinate measuring system

Sen Zhou, Jian Xu, Tao Lei, Yan Yu, Yingqian Ni

Proceedings Volume 11338, 113380P (2019) https://doi.org/10.1117/12.2542069

KEYWORDS: Sensors, Standards development, Calibration, Laser scanners, Inspection, Imaging systems, 3D metrology, Metrology, Optical sensors, Laser development

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This study proposes an experimental method for the performance evaluation of a commercial combined probing system equipped with a contacting probe, an imaging probe, and a line laser scanner developed by our cooperation. According to its application purpose, this method first obtains the circular characteristics of our novel designed 3D artefact composed of 2D rings, cone and cylinders. It is suitable to measure the touch probe, imaging probe as well as optical sensor. Next, detailed measuring procedures were defined for this artifact, in order to achieve comparable results and make the measurements feasible for the different sensors involved. A series of representative experiments were carried out on a commercial combined probing system produced by our partner. The experimental results show that multiple probing system form error and location error were less than 4.0μm, and multiple probing system size error was less than 2.0μm in three different registration positions. System combination errors were less than its maximum permissible errors (MPEs). On the other hand, its root mean errors (RMSE) were less than 0.5μm. Therefore, we can conclude that the designed artifact is suitable to be used to assess the performance of CMMs with multiple probing systems. These conclusions are helpful for further use of this combined probing system and can be utilized to optimize those combined parameters further.

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