Dr. Xin Li
at KLA China
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 1295537 (2024) https://doi.org/10.1117/12.3010816
KEYWORDS: Metrology, Resistance, Inspection, Critical dimension metrology, Design, Scanning electron microscopy, Overlay metrology, Semiconducting wafers, Defect detection

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proceedings Volume 11611, 116112W (2021) https://doi.org/10.1117/12.2583760
KEYWORDS: Etching, Statistical analysis, Semiconducting wafers, Overlay metrology, Process control, Photomasks, Optical alignment, Opacity, Metrology, Feedback control

Proceedings Article | 24 March 2020 Presentation + Paper
Huan Ren, Antonio Mani, Sixiao Han, Xin Li, Xuemei Chen, Dieter Van Den Heuvel
Proceedings Volume 11325, 1132523 (2020) https://doi.org/10.1117/12.2552911
KEYWORDS: Etching, Semiconducting wafers, Lithography, Plasma etching, Critical dimension metrology, Process control, Actuators, Optical lithography, Scanning electron microscopy

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