Dr. Xiaorui Zheng Profile

Dr. Xiaorui Zheng

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Publications (1)

Proceedings Article | 22 February 2021 Presentation

Patterning metal contacts and dopants on two-dimensional materials by thermal scanning probe lithography

Xiangyu Liu, Xiaorui Zheng, Edoardo Albisetti, Annalisa Calo’, Elisa Riedo

Proceedings Volume 11610, 1161019 (2021) https://doi.org/10.1117/12.2583555

KEYWORDS: Metals, Optical lithography, Field effect transistors, Scanning probe lithography, Graphene, Electron beam lithography, Ultraviolet radiation, Electrons, Doping, Transistors

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