KEYWORDS: Near field scanning optical microscopy, Signal detection, Optical fibers, Thin films, Optical microscopes, Near field optics, Beam shaping, Compact discs, Image resolution, Semiconducting wafers
A non-optical shear-force detection method to control the probe-simple distance for a scanning near field optical microscope (SNOM) is proposed. A rectangular piezoelectric bimorph beam is designed so that one piezo layer of the beam is used for vibrating the scanning probe and the other for detecting the vibration. Optical fiber probe is attached on one side ofthe beam to detect the shear force. When the beam is excited at resonance by the stimulation piezo layer, the other detecting layer can generate a maximum piezo voltage. The amplitude ofthe piezo voltage will decrease as the fiber tip gets close to the sample because ofthe shear force interaction experienced by the tip. The oscillating amplitude change, picked up from the detecting piezo layer, severe as feedback and shear force imaging signal. Shear force topographic and optical images of mother disc of compact disk and multicomponent compounds (Rb0 5Cs0.5Ag4I5) thin films have been taken. The results show that the improved system is easy-to-use and fit for study ofvarioi.is thin films.
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