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William John Mahoney
Research Assistant
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Publications (1)
Proceedings Article | 14 May 2004 Paper
Mist deposition of thin photoresist films
William Mahoney, Paul Roman, Paul Mumbauer, Jerzy Ruzyllo
Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.534149
KEYWORDS: Photoresist materials, Semiconducting wafers, Photoresist processing, Photoresist developing, Manufacturing, Liquids, Thin films, Microelectronics, Deposition processes, Optical microscopes
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