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Wei Zhang
at ChangXin Memory Technologies Inc
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Publications (1)
Proceedings Article | 26 May 2022 Poster + Paper
New DRAM application space for optical AEI metrology enabled by ASML self reference (ASR) targets
Jimmy Chang, Rui Qin, Junjun Zhang, Wei Zhang, Qian Zhang, Hao Jing, Shaun Dai, Sylvia Yuan, Giacomo Miceli, Bas van den Broek
Proceedings Volume 12053, 120531A (2022) https://doi.org/10.1117/12.2614584
KEYWORDS: Overlay metrology, Semiconducting wafers, Metrology, Etching, Diffractive optical elements, Astronomical imaging, Time metrology, Optical parametric oscillators, Front end of line, Yield improvement
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