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Valerio Perez
at GLOBALFOUNDRIES Singapore
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Publications (1)
Proceedings Article | 13 March 2009 Paper
Convergent automated chip level lithography checking and fixing at 45nm
Valerio Perez, Shyue Fong Quek, Sky Yeo, Colin Hui, Kuang Kuo Lin, Walter Ng, Michel Cote, Bala Kasthuri, Philippe Hurat, Matt Thompson, Chi-Min Yuan, Puneet Sharma
Proceedings Volume 7275, 72751S (2009) https://doi.org/10.1117/12.816593
KEYWORDS: Calibration, Lithography, Optical proximity correction, Critical dimension metrology, Silicon, Data modeling, Manufacturing, Scattering, Resolution enhancement technologies, Statistical modeling
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