CONFERENCE PROCEEDINGS
Advanced Search
Vadim Borisov
at Reutlingen Univ
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 19 September 2018 Paper
Research on data augmentation for lithography hotspot detection using deep learning
Vadim Borisov, Jürgen Scheible
Proceedings Volume 10775, 107751A (2018) https://doi.org/10.1117/12.2326563
KEYWORDS: Lithography, Photomasks, Data modeling, Convolution, Neural networks, Machine learning, Scanning electron microscopy, Data acquisition, Neurons
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top