Prof. Tohru Iuchi Profile

Prof. Tohru Iuchi

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Publications (3)

SPIE Journal Paper | 1 September 2006

Radiation thermometry for silicon wafers by use of polarized radiances

Tohru Iuchi, Kensuke Hiraka

OE, Vol. 45, Issue 09, 096403, (September 2006) https://doi.org/10.1117/12.10.1117/1.2354072

KEYWORDS: Semiconducting wafers, Silicon, Oxides, Silicon films, Radiation thermometry, Picosecond phenomena, Temperature metrology, Optical engineering, Polarization, Calibration

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Proceedings Article | 18 April 2006 Paper

Radiation thermometry of semitransparent silicon wafers near room temperature

Tohru Iuchi, Yoshikazu Ikeda

Proceedings Volume 6205, 62050A (2006) https://doi.org/10.1117/12.661425

KEYWORDS: Semiconducting wafers, Silicon, Silicon films, Radiation thermometry, Oxides, Temperature metrology, Reflectivity, Black bodies, Radiometry, Sensors

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Proceedings Article | 1 September 2005 Paper

Radiation thermometry for silicon wafers

T. Iuchi, Y. Ikeda, K. Hiraka

Proceedings Volume 5878, 587819 (2005) https://doi.org/10.1117/12.613857

KEYWORDS: Semiconducting wafers, Silicon, Oxides, Silicon films, Temperature metrology, Radiation thermometry, Picosecond phenomena, Sensors, Refractive index, Polarization

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