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Dr. Tianyue Yu
Strategic Advisor
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Author
Publications (4)
Proceedings Article | 29 December 2003 Paper
High-sensitivity material systems for two-photon three dimensional microfabrication
Proceedings Volume 5347, (2003) https://doi.org/10.1117/12.532614
KEYWORDS: Microfabrication, Molecules, Absorption, Polymerization, Chemically amplified resists, Chromophores, Chemistry, Lithography, Optical lithography, 3D image processing
Proceedings Article | 4 November 2002 Paper
High-sensitivity two-photon photoacid generator for three-dimensional microfabrication
Proceedings Volume 4809, (2002) https://doi.org/10.1117/12.453776
KEYWORDS: Polymerization, Microfabrication, Absorption, Molecules, Chromophores, Solids, Luminescence, Laser damage threshold, Quantum efficiency, Microelectromechanical systems
Proceedings Article | 24 July 2002 Paper
Microfabrication of hydrogels for biomedical applications
Tianyue Yu, Federica Chiellini, Dirk Schmaljohan, Roberto Solaro, Christopher Ober
Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474288
KEYWORDS: Optical lithography, Polymers, Microfabrication, Photomasks, Biosensors, Polymerization, Atomic force microscopy, Thin films, Diffraction, Lithography
Proceedings Article | 24 August 2001 Paper
Development of a bond contribution model for structure: property correlations in dry etch studies
Tianyue Yu, Philip Ching, Christopher Ober, Shreeram Deshpande, Rama Puligadda
Proceedings Volume 4345, (2001) https://doi.org/10.1117/12.436819
KEYWORDS: Etching, Polymers, Reactive ion etching, Plasma, Dry etching, Photoresist processing, Plasma etching, Ions, Resistance, Semiconductors
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