Mr. Tatsuya Sakai Profile

Tatsuya Sakai

at JSR Corp

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Publications (3)

Proceedings Article | 1 May 2023 Poster + Paper

Thin underlayer materials for metal oxide resist patterning

Satoshi Dei, Yuya Hayashi, Shumpei Akita, Shuhei Yamada, Kazunori Sakai, Tatsuya Kasai, Akitaka Nii, Ayaka Furusawa, Kazuya Takada, Tetsuro Kaneko, Tomoaki Seko, Eiji Yoneda, Tatsuya Sakai

Proceedings Volume 12498, 124981M (2023) https://doi.org/10.1117/12.2657918

KEYWORDS: Optical lithography, Silicon carbide, Extreme ultraviolet, Absorption, Silicon, Surface properties, Lithography, Extreme ultraviolet lithography, Etching, Semiconducting wafers

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Proceedings Article | 26 March 2019 Paper

New silicon hard mask material development for sub-5nm node

Tomoaki Seko, Tatsuya Kasai, Ryuuichi Serizawa, Satoshi Dei, Tatsuya Sakai

Proceedings Volume 10960, 1096025 (2019) https://doi.org/10.1117/12.2518785

KEYWORDS: Etching, Silicon, Semiconducting wafers, Extreme ultraviolet lithography, Ultraviolet radiation, Lithography, Extreme ultraviolet, Resistance, Dielectrics, Photomasks

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Proceedings Article | 19 March 2018 Paper

Substrate damageless tri-layer process for advanced ArFi lithography

Kengo Ehara, Ichihiro Miura, Masayoshi Ishikawa, Yuushi Matsumura, Kazunori Takanashi, Tatsuya Sakai, Hiroki Nakagawa

Proceedings Volume 10584, 105841B (2018) https://doi.org/10.1117/12.2297337

KEYWORDS: System on a chip, Lithography, Reflectivity, Etching, Dry etching, Semiconducting wafers, Scanning electron microscopy, Carbon, Glasses, Optical lithography

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