Dr. Tanguy Terlier Profile

Dr. Tanguy Terlier

at Rice Univ

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Publications (2)

Proceedings Article | 25 May 2022 Presentation + Paper

Enhanced catalyst mobility in chemically amplified resists

Christopher Bottoms, Tanguy Terlier, Gila Stein, Manolis Doxastakis

Proceedings Volume 12055, 1205506 (2022) https://doi.org/10.1117/12.2613355

KEYWORDS: Modeling and simulation, Monte Carlo methods, Resist chemistry, Diffusion, Polymers, Chemically amplified resists, Systems modeling, FT-IR spectroscopy, Spectroscopic ellipsometry, Polymer thin films, Optical lithography, Ions

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Proceedings Article | 22 February 2021 Presentation + Paper

Probing ion diffusion in chemically amplified resists through experiments and atomistic simulations

Christopher Bottoms, Tanguy Terlier, Gila Stein, Manolis Doxastakis

Proceedings Volume 11612, 116120C (2021) https://doi.org/10.1117/12.2581367

KEYWORDS: Photoresist materials, Ions, Diffusion

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