CONFERENCE PROCEEDINGS
Advanced Search
Sung-Jae Han
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 27 March 2014 Paper
Advanced develop processes for reducing defects related with e-beam resists
Proceedings Volume 9051, 90510W (2014) https://doi.org/10.1117/12.2047368
KEYWORDS: Photomasks, Photoresist processing, Standards development, Manufacturing, Semiconducting wafers, Inspection, Extreme ultraviolet, Optics manufacturing, EUV optics, Surface properties
Proceedings Article | 27 January 2005 Paper
The study on causes and control methods of haze contamination
Sung-Jae Han, Bo-Hye Kim, Jin-Hong Park, Yong-Hoon Kim, Seong-Woon Choi, Woo-Sung Han
Proceedings Volume 5645, (2005) https://doi.org/10.1117/12.576605
KEYWORDS: Air contamination, Photomasks, Contamination, Ions, Manufacturing, Carbon, Sulfur, Lithography, Inspection, Optical lithography
Proceedings Article | 28 August 2003 Paper
Study of characteristics and control of haze contamination induced by photochemical reaction
Sung-Jae Han, Sang-Yong Yu, Moon-Gyu Sung, Yong-Hoon Kim, Hee-Sun Yoon, Jung-Min Sohn
Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504277
KEYWORDS: Air contamination, Contamination, Photomasks, Manufacturing, Inspection, Carbon, Contamination control, Lithography, Light sources, Transmittance
Proceedings Article | 20 August 2001 Paper
Vacuum delay effect of CAR in mask fabrication
Proceedings Volume 4343, (2001) https://doi.org/10.1117/12.436658
KEYWORDS: Critical dimension metrology, Mask making, Photoresist processing, Photomasks, Chromium, Diffusion, Optical proximity correction, Ions, Chemistry, Projection systems
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top