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Dr. Souvik Kundu
at imec
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Publications (1)
Proceedings Article | 25 May 2022 Presentation + Paper
Patterning of Ru metal lines at 18nm pitch
Stefan Decoster, Souvik Kundu, Frédéric Lazzarino, Stéphane Larivière, Martin O'Toole, Gayle Murdoch, Quoc Toan Le, Marleen van der Veen, Nancy Heylen
Proceedings Volume 12056, 1205604 (2022) https://doi.org/10.1117/12.2614267
KEYWORDS: Metals, Ruthenium, Etching, Double patterning technology, Reactive ion etching
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