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Dr. Shen-Huei Sun
at Institut für Mikroelektronik Stuttgart
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Publications (1)
Proceedings Article | 2 June 2017 Paper
Alkaline fuel cell with nitride membrane
Shen-Huei Sun, Moritz Pilaski, Jens Wartmann, Florian Letzkus, Benedikt Funke, Georg Dura, Angelika Heinzel
Proceedings Volume 10246, 102460T (2017) https://doi.org/10.1117/12.2265689
KEYWORDS: Low pressure chemical vapor deposition, Coating, Plasma enhanced chemical vapor deposition, Radiation thermography, Refractive index, Deposition processes, Printing, Chemical vapor deposition, Ion implantation, Platinum, Polymers, Manufacturing, Metals, Silicon, Semiconducting wafers, Electrodes, Silver, Visible radiation
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