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Dr. Shaikh Mubassar Ali
Staff Development Engineer at Seagate Technology LLC
SPIE Involvement:
Author
Area of Expertise:
MEMS , Reliability , Corrosion , Microtribology , Fatigue , Wear
Publications (4)
Proceedings Article | 19 January 2007 Paper
Testing reliability of MEMS materials in liquids
Thomas Kuehn, S. Mubassar Ali, Susan Mantell, Ellen Longmire
Proceedings Volume 6463, 64630L (2007) https://doi.org/10.1117/12.706552
KEYWORDS: Silicon, Liquids, Microelectromechanical systems, Ferroelectric materials, Reliability, Actuators, Alternate lighting of surfaces, LabVIEW, Environmental sensing, Magnetism
Proceedings Article | 6 January 2006 Paper
Reliability of microcantilevers in liquid environments
S. Ali, Susan Mantell, Ellen Longmire
Proceedings Volume 6111, 61110C (2006) https://doi.org/10.1117/12.646514
KEYWORDS: Liquids, Microelectromechanical systems, Silicon, Reliability, Semiconducting wafers, Photoresist materials, Sensors, Deep reactive ion etching, Microfluidics, Oxides
Proceedings Article | 23 December 2003 Paper
Investigation of adhesion during operation of MEMS cantilevers
Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.532891
KEYWORDS: Microelectromechanical systems, Actuators, Reliability, Interferometry, Power supplies, Oxides, Mirrors, Switches, Space based lasers, Prototyping
Proceedings Article | 16 January 2003 Paper
Use of thermal cycling to reduce adhesion of OTS-coated MEMS cantilevers
Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.472731
KEYWORDS: Microelectromechanical systems, Promethium, Silicon, Self-assembled monolayers, Semiconducting wafers, Atomic force microscopy, Reliability, Oxides, Coating, Molecules
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