Dr. Seungju Shin Profile

Dr. Seungju Shin

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Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper

Advanced pattern defect detection and analysis with artificial intelligence

Sangchul Yeo, Yongsun Jang, Yeongju Guk, Seungju Shin, Hee Jeong, Kyungjae Park, Dawoon Choi, Jaewon Yang, Bongkeun Kim, Kyoil Koo, Seongtae Jeong

Proceedings Volume 12955, 129551E (2024) https://doi.org/10.1117/12.3009806

KEYWORDS: Image classification, Semiconducting wafers, Feature extraction, Artificial intelligence, Machine learning, Visualization, Image processing, Image enhancement, Design, Advanced patterning

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