Russell A. Black
Site Manager at Nikon Precision Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 March 2017 Presentation + Paper
Christopher Carr, Hsin-Hui Huang, HyoungKook Kim, Shannon Dunn, Jasper Munson, Russell Black, Preston Crupe, Victor Perez, Takuya Kuroda
Proceedings Volume 10147, 101471B (2017) https://doi.org/10.1117/12.2257642
KEYWORDS: Photomasks, Lithography, 193nm lithography, Photoresist materials, Semiconducting wafers, Scanners, Manufacturing, Manufacturing equipment, Photoresist processing, Back end of line, Critical dimension metrology, Acquisition tracking and pointing, Optical proximity correction

Proceedings Article | 24 March 2017 Presentation + Paper
Christopher Carr, Hsin-Hui Huang, HyoungKook Kim, Shannon Dunn, Jasper Munson, Russell Black, Preston Crupe, Victor Perez, Takuya Kuroda
Proceedings Volume 10147, 101470C (2017) https://doi.org/10.1117/12.2257633
KEYWORDS: Semiconducting wafers, Lithography, Photomasks, Overlay metrology, Back end of line, 193nm lithography, High volume manufacturing, Manufacturing, Scanners, Metals, Source mask optimization, Atrial fibrillation, Photoresist processing, Silicon

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