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Rob C. Wieggers
at FOM Institute DIFFER
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Publications (1)
Proceedings Article | 18 May 2007 Paper
Plasma-induced damage of multilayer coatings in EUVL
R. Wieggers, W. Goedheer, E. Louis, F. Bijkerk
Proceedings Volume 6586, 65860L (2007) https://doi.org/10.1117/12.724889
KEYWORDS: Ions, Argon, Electrons, Plasma, Sputter deposition, Particles, Monte Carlo methods, Photons, Extreme ultraviolet, Extreme ultraviolet lithography
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