Dr. Reza Hajiahmadi
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 March 2019 Presentation + Paper
Simon Mathijssen, Marc Noot, Murat Bozkurt, Narjes Javaheri, Reza Hajiahmadi, Antonios Zagaris, Ken Chang, Benny Gosali, Eason Su, Cathy Wang, Arie den Boef, Kaustuve Bhattacharyya, Guo-Tsai Huang, Kai-Hsiung Chen, John Lin
Proceedings Volume 10959, 109591G (2019) https://doi.org/10.1117/12.2514949
KEYWORDS: Overlay metrology, Semiconducting wafers, Diffraction gratings, Scanning electron microscopy, Diffraction, Etching, Target detection, Sensors, Metrology, Switching

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top