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Dr. Reza Hajiahmadi
at ASML Netherlands BV
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Publications (1)
Proceedings Article | 26 March 2019 Presentation + Paper
Color mixing in overlay metrology for greater accuracy and robustness
Simon Mathijssen, Marc Noot, Murat Bozkurt, Narjes Javaheri, Reza Hajiahmadi, Antonios Zagaris, Ken Chang, Benny Gosali, Eason Su, Cathy Wang, Arie den Boef, Kaustuve Bhattacharyya, Guo-Tsai Huang, Kai-Hsiung Chen, John Lin
Proceedings Volume 10959, 109591G (2019) https://doi.org/10.1117/12.2514949
KEYWORDS: Overlay metrology, Semiconducting wafers, Diffraction gratings, Scanning electron microscopy, Diffraction, Etching, Target detection, Sensors, Metrology, Switching
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