Mr. Po-Tung Lee Profile

Po-Tung Lee

at Univ of Wisconsin-Madison

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Publications (3)

Proceedings Article | 16 June 2003 Paper

Predicting local thermomechanical distortions of the 200-mm EPL mask system

Po-Tung Lee, Roxann Engelstad, Edward Lovell, Shintaro Kawata, Noriyuki Hirayanagi, Michael Sogard

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.504552

KEYWORDS: Photomasks, Semiconducting wafers, Electron beams, Silicon, Reticles, Thermal modeling, Prototyping, Lithography, Electron beam lithography, Projection lithography

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Proceedings Article | 21 July 2000 Paper

Thermomechanical simulations for microbeam reduction lithography

Gary Frisque, Po-Tung Lee, Edward Lovell, Roxann Engelstad, Ka-Ngo Leung, Vinh Ngo, Karen Scott

Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390097

KEYWORDS: Lithography, Photomasks, Silicon, Chemical elements, Semiconducting wafers, Ions, Thermal modeling, Projection lithography, Ion beams, Systems modeling

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Proceedings Article | 25 June 1999 Paper

Thermomechanical distortions of ion-beam stencil masks during exposure

Po-Tung Lee, Byung-Kyu Kim, Gary Frisque, Richard Tejeda, Roxann Engelstad, Edward Lovell, William Beckman, John Mitchell

Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351146

KEYWORDS: Photomasks, Electrodes, 3D modeling, Ion beams, Thermal modeling, Silicon, Semiconducting wafers, Lithography, Solids, Projection lithography

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