Pin-Yuan Su
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12954, 129540C (2024) https://doi.org/10.1117/12.3012028
KEYWORDS: Transistors, Lithography, Optical proximity correction, Semiconducting wafers, Device simulation, Design rules, Field effect transistors, Extreme ultraviolet lithography

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume 12495, 1249512 (2023) https://doi.org/10.1117/12.2658706
KEYWORDS: Transistors, Standards development

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