Dr. Petar Žuvela Profile

Dr. Petar Žuvela

at Onto Innovation Inc

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 27 April 2023 Presentation + Paper

Characterization of asymmetries in 3D NAND memory devices

Jie Li, Shashank Srivastava, Joyce Li, Zhuo Chen, Petar Žuvela, Boyang Chor, Jinyu Deng, Haodong Qiu, YaChing Chang, Sadao Takabayashi, Xadric Yiew, Bo Hui Ng, Rohit Kothari, Dan Engelhard, Han Yang Tan

Proceedings Volume 12496, 124960F (2023) https://doi.org/10.1117/12.2658148

KEYWORDS: Education and training, Semiconducting wafers, Overlay metrology, Critical dimension metrology, Mueller matrices, 3D metrology, Data modeling, 3D modeling, Machine learning, Spectral response

Read Abstract +

Proceedings Article | 22 February 2021 Presentation + Paper

Methods to overcome limited labeled data sets in machine learning-based optical critical dimension metrology

Franklin Wong, Yudong Hao, Wenmei Ming, Petar Žuvela, Peifen Teh, Jingsheng Shi, Jie Li

Proceedings Volume 11611, 116111P (2021) https://doi.org/10.1117/12.2583774

KEYWORDS: Metrology, Machine learning, Signal processing, Semiconductors, Data modeling, Time metrology, Data processing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years