CONFERENCE PROCEEDINGS
Advanced Search
Naotoshi Sato
at FUJIFILM Corp
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 14 October 2011 Paper
Fabrication of 20-nm half-pitch quartz template by nano-imprinting
Naotoshi Sato, Tadashi Oomatsu, Satoshi Wakamatsu, Katsuhiro Nishimaki, Toshihiro Usa, Kunihiko Kodama, Kazuyuki Usuki
Proceedings Volume 8166, 81661V (2011) https://doi.org/10.1117/12.896504
KEYWORDS: Nanoimprint lithography, Quartz, Silicon, Photomasks, Chromium, Photoresist processing, Etching, Scanning electron microscopy, Reactive ion etching, Nanofabrication
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top