To form a better uniform metal nano-particles (Nps) film, the spatial distribution of Nps produced by femtosecond (fs)
pulsed-laser deposition (PLD) method has been studied in detail. Firstly, the spatial distribution of Nps is collected by a
slice of harden plastic under different laser fluence. Secondly, the deposition slices are scanned into jpg images. Then,
the gray intensity of Nps deposit in the images has been used to have information of the number of deposited Nps. The
data are analyzed by Matlab, Excel and Origin software. Experimental results show that the Nps' spatial distribution is
following the Anisimov gas expansion model, in which a k value shows a descending trend with the increasing of laser
fluence. Most Nps are flying to a narrow angle θ (θ≈0-30 degree), which is departing away the vertical direction of
material surface. A 3cm deposition distance and θ≈30 degree are chosen to deposit Cu Nps film. The deposited Cu film
seems not very compact and the Nps can be seen clearly in 0.7 J/cm2 with 500s deposition time, and the growing velocity
of Cu film is near 0.14-0.16 nm/s.
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