Moran Guo
at Yangtze Memory Technologies Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 18 March 2019 Presentation
Proceedings Volume 10961, 109610J (2019) https://doi.org/10.1117/12.2515725
KEYWORDS: Critical dimension metrology, Light sources, Semiconducting wafers, Yield improvement, Deep ultraviolet, Scanners, Control systems, Source mask optimization

Proceedings Article | 20 March 2018 Presentation + Paper
Proceedings Volume 10587, 105870G (2018) https://doi.org/10.1117/12.2297397
KEYWORDS: Photomasks, Source mask optimization, Optical proximity correction, Lithography, SRAF, Semiconducting wafers, Printing, Electroluminescence, Scanning electron microscopy, Pattern recognition

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