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Mikhail Erdmanis
Optical Designer at Dispelix Oy
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Publications (1)
Proceedings Article | 14 March 2013 Paper
A highly accurate engineering of silicon integrated microring resonators based on the nanofabrication technique
M. Erdmanis, L. Karvonen, A. Säynätjoki, S. Honkanen, I. Tittonen
Proceedings Volume 8629, 86291J (2013) https://doi.org/10.1117/12.2007266
KEYWORDS: Resonators, Atomic layer deposition, Waveguides, Silicon, Dispersion, Microrings, Wave propagation, Silica, Nanofabrication, Titanium dioxide
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